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Ion beam bombardment effects during film deposition: S M Rossnagel and J J Cuomo,Vacuum,38, 1988, 73–81

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 151 KB
Volume: 39
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(89)90796-3

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Special series on irradiation enhanced a

Special series on irradiation enhanced adhesion. Ion beam bombardment effects during film deposition : S. M. Rossnagel and J. J. Cuomo. Vacuum38, 73 (1988)

📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 127 KB