Ion-Beam Assisted Glancing Angle Deposition for Relative Humidity Sensors

✍ Scribed by Taschuk, Michael T.; Sorge, Jason B.; Steele, John J.; Brett, Michael J.

• Book ID: 120332575
• Publisher: IEEE
• Year: 2008
• Tongue: English
• Weight: 396 KB
• Volume: 8
• Category: Article
• ISSN: 1530-437X
• DOI: 10.1109/JSEN.2008.924385