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Ion-beam assisted etching of semiconductors : P. C. Zalm. Vacuum36(11/12), 787 (1986)

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 129 KB
Volume: 27
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(87)90170-3

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