✦ LIBER ✦
Ion beam assisted etching of a fluorinated polyimide in order to insert it in an electro-optical system
✍ Scribed by B. Lucas; C. Moussant; R. Antony; A. Moliton
- Book ID
- 117542795
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 170 KB
- Volume
- 102
- Category
- Article
- ISSN
- 0379-6779
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