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Ion beam analysis of ion-assisted deposited amorphous GaN

โœ Scribed by V.J. Kennedy; A. Markwitz; U.D. Lanke; A. McIvor; H.J. Trodahl; A. Bittar


Book ID
114165550
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
99 KB
Volume
190
Category
Article
ISSN
0168-583X

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Irradiation of a substrate by an energetic ion beam during film deposition can drastically change the substrate surface, its structure, the surface chemistry, the nucleation processes and the type of coating which is produced. A wide range of novel coatings and improved adhesion to the substrate are