Iodide-Based Atomic Layer Deposition of ZrO2: Aspects of Phase Stability and Dielectric Properties

✍ Scribed by K. Forsgren; J. Westlinder; J. Lu; J. Olsson; A. Hårsta

• Publisher: John Wiley and Sons
• Year: 2002
• Tongue: English
• Weight: 269 KB
• Volume: 8
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/1521-3862(20020503)8:3<105::aid-cvde105>3.0.co;2-e