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Investigations on the Electron Component in an Argon-Hexamethyldisiloxane (HMDS) Low Pressure Glow Discharge by Probe Diagnostics

✍ Scribed by M. Maass; M. Schmidt


Publisher
John Wiley and Sons
Year
1987
Tongue
English
Weight
648 KB
Volume
27
Category
Article
ISSN
0005-8025

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