Investigations on the defect depth of electroerosive-cut Te single crystals by reflection electron diffraction (RHEED)
✍ Scribed by Dr. A. Messerschmidt; Dr. G. Lehmann; M. Kanis
- Publisher
- John Wiley and Sons
- Year
- 1975
- Tongue
- English
- Weight
- 579 KB
- Volume
- 10
- Category
- Article
- ISSN
- 0232-1300
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✦ Synopsis
Abstract
Results of the experimentally determined defect depth due to electroerosive working of Te single crystals as a function of crystal orientation and electric cutting energy by RHEED are given. The abrasion of the disturbed surface layer was made by chemical etch polishing as well as by bombardment with Ar^+^ ions. The defect depths determined from the RHEED patterns depend on the crystal orientation and the applied cutting energy. In case of the lowest cutting energy, it has a value of about 3 μm for the (0001)‐orientation and 6 μm for the (1010)‐orientation, the corresponding values for the highest cutting energy are about 8 μm and 20 μm, respectively. It is discussed in how far defect depths determined from the interpretation of RHEED patterns correspond to the “real defect depths” which can be determined by other measuring techniques.