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Investigations on microstructure, composition and properties of PECVD TiNx-coatings

✍ Scribed by J. Klosowski, I. Endler, A. Leonhardt…

Book ID
120751784
Publisher
Springer
Year
1995
Tongue
English
Weight
806 KB
Volume
353
Category
Article
ISSN
1618-2650

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## Abstract Silicon‐oxygen amorphous thin film alloys (a‐SiO~x~) are grown at room temperature by plasma‐enhanced (PE)CVD on two dental materials; a ceramic and a microcomposite resin. A compositional analysis of substrates and films is performed by energy dispersive X‐ray spectroscopy (EDX), while