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Investigations of the structure of a-C:H films

✍ Scribed by R. Kleber; W. Dworschak; J. Gerber; A. Krüger; K. Jung; H. Ehrhardt; S. Schulze; I. Mühling; S. Deutschmann; W. Scharff; F. Engelke; H. Metz

Book ID: 108025600
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 349 KB
Volume: 140
Category: Article
ISSN: 0921-5093
DOI: 10.1016/0921-5093(91)90512-l

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