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Investigations of optical anisotropy at polymer surfaces and in thin polymer films by variable angle ellipsometry

✍ Scribed by H. Kasten; G. Strobl

Book ID
112290701
Publisher
Springer
Year
1993
Tongue
English
Weight
182 KB
Volume
346
Category
Article
ISSN
1618-2650

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## Abstract Silicon oxynitride (SiO~x~ N~y~) thin films were deposited on silicon substrates by ion‐assisted deposition. Variable angle spectroscopic ellipsometry (VASE) was used to optically characterize the deposited film properties, such as layer thickness and composition, film surface and inter