Investigation on the stiffness and linear error of an air slide table of ultra precision machine in nano-machining
✍ Scribed by M. Vahdati; A. Shokuhfar
- Publisher
- John Wiley and Sons
- Year
- 2008
- Tongue
- English
- Weight
- 377 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0933-5137
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✦ Synopsis
Abstract
Ultra precision machines are new generation of machine tools. They produce more accurate pieces in size and tolerance. Various rotational or linear movement mechanisms of these machines have been consisted of two main components; stationery or rail, and moving or slider. They are separated by a pressurized air film to reduce the friction resistance between mating parts. Thus, the relative movement happens through an air film. Two main problems for such systems are stiffness and linear motion errors. These issues will affect product quality. Due to such reason, most steel and iron manufacturers are very much interested to search about their product behavior under conditions of loading them as a thrust or journal bearing.
In order to study stiffness and error characteristics of the movement mechanisms in this research, there have been experimental investigations about their variation behavior, and their relationship with input parameters such as inlet air pressure, applied load. Consequently, the best performance condition was identified. Additionally, the general behavior of errors in linear motion was recognized. Also, optimum conditions were identified in order to have the least errors.