✦ LIBER ✦
Investigation on boron transient enhanced diffusion induced by the advanced P+/N ultra-shallow junction fabrication processes
✍ Scribed by F. Lallement; D. Lenoble
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 385 KB
- Volume
- 237
- Category
- Article
- ISSN
- 0168-583X
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