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Investigation of tungsten incorporated amorphous carbon film

✍ Scribed by Rusli; S.F. Yoon; H. Yang; J. Ahn; Q.F. Huang; Q. Zhang; Y.P. Guo; C.Y. Yang; E.J. Teo; A.T.S. Wee; A.C.H Huan


Book ID
114086837
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
178 KB
Volume
355-356
Category
Article
ISSN
0040-6090

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