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Investigation of the valence band states of reactively sputtered carbon nitride films

✍ Scribed by M.A. Monclus; D.C. Cameron; A.K.M.S. Chowdhury; R. Barkley; M. Collins

Book ID: 114086838
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 185 KB
Volume: 355-356
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(99)00512-x

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The existence of with hardness characteristics similar or better than diamond was predicted in 1990 by Liu b-C 3 N 4 and Cohen. Many studies have since been devoted to the synthesis of this compound. In the present work, carbon nitride Ðlms were deposited by various reactive magnetron sputtering pro