Investigation of the uniformity of ohmic contacts to n-type GaAs formed by rapid thermal processing

✍ Scribed by W.Y. Zhou; J. Xu; Y.B. Liou; C. Huang

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 183 KB
• Volume: 36
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(93)90155-j