Investigation of the structure of thin rhenium films

✍ Scribed by Dr. I. E. Protsenko; Dipl.- Ing. V. M. Severin; Dr. A. F. Skorobogagat'ko

• Publisher: John Wiley and Sons
• Year: 1976
• Tongue: English
• Weight: 299 KB
• Volume: 11
• Category: Article
• ISSN: 0232-1300
• DOI: 10.1002/crat.19760110906

✦ Synopsis

Abstract

The phase composition of thin rhenium films as depending on deposition conditions has been studied. In films deposited at a pressure of 10^−5^ torr impurity phases with simple cubic and hexagonal lattices were found. In films evaporated at a pressure of 10^−8^ torr only an hep phase equilibrium in bulk samples is formed. It has been concluded that in thin rhenium films no transitions to a fcc phase occurs.

In the present work the dependence of thin film phase composition was investigated as a function of film thickness (∼5–500 Å), deposition rate (∼0.1–10 Å/sec) and substrate temperatur (∼ 20–450°C). The films were deposited on NaCl single crystals at a pressure of 10^−5^ torr (oil diffusion pump evacuation) an 10^−8^ torr (“Orbitron”‐type pump evacuation). The measurement of film thickness was conducted by the optical interference method.