Investigation of the metrological characteristics of a scanning probe measuring microscope using TGZ type calibration gratings

✍ Scribed by K. V. Gogolinskii, K. L. Gubskii, A. P. Kuznetsov, V. N. Reshetov, I. I. Maslenikov, S. S. Golubev, V. G. Lysenko, S. I. Rumyantsev

• Book ID: 118806093
• Publisher: Springer US
• Year: 2012
• Tongue: English
• Weight: 208 KB
• Volume: 55
• Category: Article
• ISSN: 0543-1972
• DOI: 10.1007/s11018-012-9972-4