The mechanism of two-photon photochemica
The mechanism of two-photon photochemical laser-induced deposition of silicon thin films from silane
โ
Shoshana Tamir; Shammai Speiser
๐
Article
๐
1996
๐
Springer
โ 902 KB
We have investigated the mechanism of silicon thin film deposition by ArF excimer laser irradiation of silane gas diluted with argon. The Si films were deposited by a focused laser beam irradiating in parallel to silicon and silicon dioxide substrates at a gas flow rate of 20 SCCM, total pressure of