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Investigation of the influence of thermal treatment on interconnect-barrier interfaces in copper metallization systems

✍ Scribed by Oliver Aubel; Eberhard Bugiel; Dietmar Krüger; Wolfgang Hasse; Martina Hommel

Book ID
108210606
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
302 KB
Volume
46
Category
Article
ISSN
0026-2714

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The change of magnetoelastic properties after thermal treatments has been investigated for two groups of metallic glasses. (Fe 79 Co 21 ) 75+x Si 15-1.4x B 10+0.4x (x (at.%) = 0, 2, 4, 6, 8, 10) has been studied both in the as-prepared state and after thermal annealing in an applied magnetic field,