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Investigation of the growth kinetics of glow‐discharge hydrogenated amorphous silicon using a radical separation technique

✍ Scribed by Matsuda, Akihisa; Tanaka, Kazunobu


Book ID
118265864
Publisher
American Institute of Physics
Year
1986
Tongue
English
Weight
692 KB
Volume
60
Category
Article
ISSN
0021-8979

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