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Investigation of the film growth of a new titanium precursor for MOCVD

✍ Scribed by F.-R. Lang; E.C. Plappert; K.-H. Dahmen; R. Hauert; P. Nebiker; M. Döbeli

Book ID: 115990433
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 327 KB
Volume: 187
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(95)00220-0

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