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Investigation of the effects of pumping speed and Ar/O2 ratio on the transient time at mode transition in Ti-O2 reactive sputtering

✍ Scribed by E. Kusano; A. Kinbara


Book ID
113205348
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
403 KB
Volume
281-282
Category
Article
ISSN
0040-6090

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