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Investigation of the degradation of silane molecules in a pulsed volume discharge

✍ Scribed by A. K. Shuaibov; L. L. Shimon; A. I. Dashchenko; A. I. Minya

Book ID: 110123774
Publisher: SP MAIK Nauka/Interperiodica
Year: 1998
Tongue: English
Weight: 57 KB
Volume: 24
Category: Article
ISSN: 1063-7850
DOI: 10.1134/1.1262287

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