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Investigation of Structural, Electrical, and Optical Properties for Al-Doped ZnO Films Deposited at Different Substrate Temperatures and H2 Ratios

✍ Scribed by Zhu, B. L.; Wang, J.; Zhu, S. J.; Wu, J.; Zeng, D. W.; Xie, C. S.

Book ID
125537640
Publisher
The Electrochemical Society
Year
2012
Tongue
English
Weight
690 KB
Volume
159
Category
Article
ISSN
0013-4651

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## Abstract Transparent and conductive Al‐doped ZnO (AZO) films with thickness between 0.2 and 1.1 ΞΌm were deposited by sputtering at room temperature on glass and polyethylene terephthalate (PET) substrates. All films were polycrystalline with average crystallite size increasing when the film thic