Investigation of Strain Engineering in FinFETs Comprising Experimental Analysis and Numerical Simulations

✍ Scribed by Conzatti, F.; Serra, N.; Esseni, D.; De Michielis, M.; Paussa, A.; Palestri, P.; Selmi, L.; Thomas, S.M.; Whall, T.E.; Leadley, D.; Parker, E.H.C.; Witters, L.; Hytch, M.J.; Snoeck, E.; Wang, T.J.; Lee, W.C.; Doornbos, G.; Vellianitis, G.; van Dal, M.J.H.; Lander, R.J.P.

• Book ID: 114620426
• Publisher: IEEE
• Year: 2011
• Tongue: English
• Weight: 930 KB
• Volume: 58
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2011.2119320