✦ LIBER ✦
Investigation of SiO2 layers by glow discharge optical emission spectroscopy including layer thickness determination by an optical interference effect
✍ Scribed by Dorka, Roland; Kunze, Reinhard; Hoffmann, Volker
- Book ID
- 120454208
- Publisher
- Royal Society of Chemistry
- Year
- 2000
- Tongue
- English
- Weight
- 118 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0267-9477
- DOI
- 10.1039/b000905i
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