Investigation of rough surfaces and transparent birefringent samples with Mueller-matrix scatterometry

✍ Scribed by Delplancke, Françoise H.

• Book ID: 115346506
• Publisher: The Optical Society
• Year: 1997
• Tongue: English
• Weight: 573 KB
• Volume: 36
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.36.007621