✦ LIBER ✦
Investigation of reactive ion etch-induced damage in InP surfaces using a noncontact photothermal radiometric probe
✍ Scribed by G.M. Crean; P.A.F. Herbert; I. Little; W.M. Kelly; J.Y. Marzin; A. Izrael; B. Jusserand
- Book ID
- 103615755
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 212 KB
- Volume
- 50
- Category
- Article
- ISSN
- 0169-4332
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