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Investigation of oxidation process and properties of indium and tin-based thin-film heterostructures

✍ Scribed by V. A. Logacheva; T. A. Myachina; A. N. Lukin; A. M. Khoviv

Book ID
110202921
Publisher
Pleiades Publishing
Year
2008
Tongue
English
Weight
281 KB
Volume
2
Category
Article
ISSN
1027-4510

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✍ Zuqiang Qi; Xuekang Chen; Chuizhen Fan; Weiping Chai πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 425 KB

Indium-tin-oxide (ITO) thin films and ITO/Ag alloy/ITO multilayered thin films were deposited on glass substrates using a vertical in-line multilayer sputtering system. Ceramic ITO targets were used for the deposition of ITO layers at low substrate temperature of 100 β€’ C. It was observed that the s