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Investigation of nucleation centres in diamond chemical vapour deposition with spatially resolved X-ray photoelectron spectroscopy

✍ Scribed by Ajji, Z.; Buck, M.; Wöll, Ch.


Book ID
123594978
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
727 KB
Volume
2
Category
Article
ISSN
0925-9635

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## Abstract Diamond synthesis by microwave plasma assisted chemical vapour deposition (MPCVD) with a bias enhanced nucleation (BEN) step constitutes the most efficient method to obtain heteroepitaxy and is also useful to reach high nucleation densities. In this study, sequential reflection high‐ene