✦ LIBER ✦
Investigation of Ni/Co bilayer salicidation process for sub-40 nm gate technology
✍ Scribed by Eun Ji Jung; Sug-Woo Jung; Hyun-Su Kim; Jong-Ho Yun; Seong Hwee Cheong; Byung Hee Kim; Gil Heyun Choi; Sung Tae Kim; U-In Chung; Joo Tae Moon; Byung Il Ryu
- Book ID
- 104050387
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 287 KB
- Volume
- 82
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.