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Investigation of laser recrystallization of thin Si films using numerical simulation

✍ Scribed by B. Hu; A. Seidl; R. Buchner; D. Bollmann; W. van der Wel; K. Haberger


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
957 KB
Volume
46
Category
Article
ISSN
0169-4332

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