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Investigation of ion impact desorption of atoms and molecules by low energy ion scattering (ISS)

✍ Scribed by E. Taglauer; U. Beitat; W. Heiland

Publisher
Elsevier Science
Year
1978
Weight
315 KB
Volume
149
Category
Article
ISSN
0029-554X

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Secondary Ions Produced by Low-energy Im
Secondary Ions Produced by Low-energy Impact of He+ and Ne+ ions on van der Waals Thin Films
✍ T. Sato; A. Shimizu; K. Nakamura; K. Hiraoka πŸ“‚ Article πŸ“… 1997 πŸ› John Wiley and Sons 🌐 English βš– 187 KB πŸ‘ 1 views

Secondary ions produced by low-energy He + and Ne + ion impact on van der Waals solid thin films deposited on a silicon substrate were measured as a function of film thickness using a reflectron-type time-of-flight mass spectrometer. The intensities of secondary ions N + and N 3 + produced by 400 eV