Investigation of electrical and optical properties in semiconductor structures via SEM techniques with high spatial resolution

✍ Scribed by Yakimov, E. B.

• Book ID: 119883675
• Publisher: Pleiades Publishing
• Year: 2012
• Tongue: English
• Weight: 385 KB
• Volume: 6
• Category: Article
• ISSN: 1027-4510
• DOI: 10.1134/s1027451012110158