✦ LIBER ✦
Investigation of Dual Radio-Frequency Driven Sheaths and Ion Energy Distributions Bombarding an Insulating Substrate
✍ Scribed by Li-Hong, Wang; Zhong-Ling, Dai; You-Nian, Wang
- Book ID
- 121354872
- Publisher
- Institute of Physics
- Year
- 2006
- Tongue
- English
- Weight
- 238 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0256-307X
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