✦ LIBER ✦
Investigation of domain related topography formation during chemical mechanical polishing of piezoelectric ceramic material
✍ Scribed by Uhlig, S.; Nicolai, M.; Schönecker, A.; Michaelis, A.
- Book ID
- 127002872
- Publisher
- Institute of Materials, Minerals and Mining
- Year
- 2009
- Tongue
- English
- Weight
- 206 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0267-0836
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