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Investigation of Depth of Laser Damage to Silicon as Function of Wavelength and Pulse Duration

✍ Scribed by Thorstensen, Jostein; Foss, Sean Erik

Book ID: 122389324
Publisher: Elsevier
Year: 2013
Weight: 617 KB
Volume: 38
Category: Article
ISSN: 1876-6102
DOI: 10.1016/j.egypro.2013.07.348

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