Investigation of depositing large area uniform diamond films in multi-mode MPCVD chamber

✍ Scribed by Weng, J.; Xiong, L.W.; Wang, J.H.; Dai, S.Y.; Man, W.D.; Liu, F.

• Book ID: 118070193
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 832 KB
• Volume: 30
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/j.diamond.2012.09.007