Investigation of conditions for preparation of oriented nanotubes at department of microelectronics in a modified plasma-enhanced hot filament chemical vapor deposition reactor

✍ Scribed by Peter Vinduska; Jan Janik; Dalibor Buc

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 968 KB
• Volume: 40
• Category: Article
• ISSN: 1386-9477
• DOI: 10.1016/j.physe.2007.10.099