✦ LIBER ✦
Investigation of attractive forces between PECVD silicon nitride microstructures and an oxidized silicon substrate
✍ Scribed by P.R. Scheeper; J.A. Voorthuyzen; W. Olthuis; P. Bergveld
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 981 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0924-4247
No coin nor oath required. For personal study only.