Investigation of argon ion bombarded RexSi1-x thin film composites by XPS, SEM and AES

✍ Scribed by R. Reiche; S. Oswald; H. Vinzelberg; C. Metz; J. Schumann; A. Heinrich; K. Wetzig

• Publisher: Springer
• Year: 1997
• Tongue: English
• Weight: 438 KB
• Volume: 358
• Category: Article
• ISSN: 1618-2650
• DOI: 10.1007/s002160050420