✦ LIBER ✦
Investigation of Ar ion implant gettering of gold in silicon by m.o.s. and Rutherford backscattering techniques: A. G. Nassibian and B. Golija. IEE Proc., 127, (I, 1) 29 (February 1980)
- Publisher
- Elsevier Science
- Year
- 1980
- Tongue
- English
- Weight
- 45 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0026-2714
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