Investigation of anodic silicon-oxide surface layers with the aid of SIMS: N Klaus and I L Baranow, Vacuum, 32 (6), 1982, 319–323

• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 175 KB
• Volume: 33
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(83)90778-9