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Investigation of Al2O3 film-thickness by tunnel emission and capacitance measurements

✍ Scribed by K.H. Gundlach; G. Heldmann

Publisher: Elsevier Science
Year: 1967
Tongue: English
Weight: 315 KB
Volume: 5
Category: Article
ISSN: 0038-1098
DOI: 10.1016/0038-1098(67)90317-1

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