Investigating carbon materials for use as the electron emission source in a parallel electron-beam lithography system

✍ Scribed by W.I Milne; K.B.K Teo; M Chhowalla; G.A.J Amaratunga; J Yuan; J Robertson; P Legagneux; G Pirio; Karim Bouzehouane; D Pribat; W Bruenger; C Trautmann

• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 594 KB
• Volume: 1
• Category: Article
• ISSN: 1567-1739
• DOI: 10.1016/s1567-1739(01)00030-x