Introduction to Semiconductor Manufacturing Technology

✍ Scribed by Hong Xiao

• Publisher: Society of Photo-Optical Instrumentation Engineers (SPIE)
• Year: 2012
• Tongue: English
• Leaves: 704
• Category: Library

✦ Synopsis

IC chip manufacturing processes are complex methods that draw upon many disciplines. Introduction to Semiconductor Manufacturing Technologies, Second Edition describes the processes with minimal mathematics, chemistry, and physics; it covers advanced concepts while keeping the contents accessible to readers without advanced degrees. Designed as a textbook for college students, this book provides a realistic picture of the semiconductor industry and an in-depth discussion of IC chip fabrication technology. Read more...

✦ Table of Contents

Content: Table of Contents; Preface to the First Edition; Preface to the Second Edition; List of Acronyms; Chapter 1: Introduction; Chapter 2:Introduction to IntegratedCircuit Fabrication; Chapter 3: Semiconductor Basics; Chapter 4: Wafer Manufacturing, Epitaxy, and Substrate Engineering; Chapter 5: Thermal Processes; Chapter 6: Photolithography; Chapter 7: Plasma Basics; Chapter 8: Ion Implantation; Chapter 9: Etch; Chapter 10: Chemical Vapor Deposition and Dielectric Thin Films; Chapter 11: Metallization; Chapter 12: Chemical Mechanical Polishing; Chapter 13: Process Integration. Chapter 14: Integrated Circuit Processing TechnologiesChapter 15: Future Trends and Summary; Index.
Abstract: IC chip manufacturing processes are complex methods that draw upon many disciplines. Introduction to Semiconductor Manufacturing Technologies, Second Edition describes the processes with minimal mathematics, chemistry, and physics; it covers advanced concepts while keeping the contents accessible to readers without advanced degrees. Designed as a textbook for college students, this book provides a realistic picture of the semiconductor industry and an in-depth discussion of IC chip fabrication technology