✦ LIBER ✦
Introduction to reactive ion beam etching : D. F. Downey, W. R. Bottoms and P. R. Hanley. Solid-St. Technol.121 (February 1981)
- Book ID
- 103280317
- Publisher
- Elsevier Science
- Year
- 1981
- Tongue
- English
- Weight
- 52 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0026-2714
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