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Introduction to Microfabrication (Franssila/Introduction to Microfabrication) || Equipment for Hot Processes

✍ Scribed by Franssila, Sami

Publisher: John Wiley & Sons, Ltd
Year: 2010
Weight: 815 KB
Category: Article
ISBN: 0470749830
DOI: 10.1002/9781119990413.ch32

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Epitaxy is a very special case of thin-film deposition: the deposited film will be single crystalline. This can only take place when special conditions are met. The deposited layer registers the crystalline information from the substrate. In order to do so properly, the crystal lattices of the film