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IntriX: a numerical model for electron probe analysis at high depth resolution. Part I—Theoretical description

✍ Scribed by P.-F. Staub

Publisher: John Wiley and Sons
Year: 1998
Tongue: English
Weight: 541 KB
Volume: 27
Category: Article
ISSN: 0049-8246
DOI: 10.1002/(sici)1097-4539(199801/02)27:1<43::aid-xrs247>3.0.co;2-n

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✦ Synopsis

The theoretical description of a quantitative electron probe model, IntriX, is presented. It consists of a numerical reconstruction of the in-depth ionization distribution U(qz) through the use of basic physical macroscopic parameters describing the electron beam-matter interaction. With the aim of characterizing nanometer features in samples, speciÐc attention is paid to the treatment of analysis performed on in-depth non-homogeneous samples (Ðlms on substrates) and also at low beam energies keV) and near the ionization threshold E 0

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IntriX: a numerical model for electron probe analysis at high depth resolution. Part II—tests and confrontation with experiments

✍ P.-F. Staub; P. Jonnard; F. Vergand; J. Thirion; and C. Bonnelle 📂 Article 📅 1998 🏛 John Wiley and Sons 🌐 English ⚖ 565 KB

The model called IntriX, designed to interpret quantitatively electron probe analysis data, was tested via confrontations between its results and experimental or Monte Carlo data. These confrontations were established for in-depth ionization distributions U(qz) and characteristic x-ray relative inte